Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11813714 | Chemical mechanical polishing pad and chemical mechanical polishing apparatus including the same | Hojoong Kim, Taesung Kim, Seokjun Hong, Junyong Kim, Youngjin Hong | 2023-11-14 |
| 9349626 | Buffer units, substrate processing apparatuses, and substrate processing methods | Kihoon Choi, Byung Man Kang, Byung Chul Kang | 2016-05-24 |
| 9153464 | Substrate processing apparatus and substrate processing method | Byung Chul Kang, Byung Man Kang, Seong-Soo Kim | 2015-10-06 |