Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5907158 | Broad range ion implanter | Mehran Nasser-Ghodsi, Hilton F. Glavish, Kenneth H. Purser, Gaylord C. Noblitt, III | 1999-05-25 |
| 5196355 | Simox materials through energy variation | — | 1993-03-23 |
| 5080730 | Implantation profile control with surface sputtering | — | 1992-01-14 |
| 4628209 | Particle implantation apparatus and method | — | 1986-12-09 |
| 4528208 | Method and apparatus for controlling article temperature during treatment in vacuum | James Hirvonen, A. Stuart Denholm | 1985-07-09 |