| 6237527 |
System for improving energy purity and implant consistency, and for minimizing charge accumulation of an implanted substrate |
Peter L. Kellerman, James D. Bernstein |
2001-05-29 |
| 6180954 |
Dual-walled exhaust tubing for vacuum pump |
Kevin Verrier, James P. Quill |
2001-01-30 |
| 6101971 |
Ion implantation control using charge collection, optical emission spectroscopy and mass analysis |
Jiong Cheng, Michael Graf, Peter L. Kellerman, George Stejic |
2000-08-15 |
| 6050218 |
Dosimetry cup charge collection in plasma immersion ion implantation |
Jiong Chen, Peter L. Kellerman |
2000-04-18 |
| 5911832 |
Plasma immersion implantation with pulsed anode |
Jiqun Shao |
1999-06-15 |
| 5654043 |
Pulsed plate plasma implantation system and method |
Jiqun Shao |
1997-08-05 |
| 5134299 |
Ion beam implantation method and apparatus for particulate control |
— |
1992-07-28 |
| 4667111 |
Accelerator for ion implantation |
H. F. Glavish, G. K. Simcox |
1987-05-19 |
| 4528208 |
Method and apparatus for controlling article temperature during treatment in vacuum |
James Hirvonen, Andrew B. Wittkower |
1985-07-09 |
| 4446373 |
Process and apparatus for converged fine line electron beam treatment objects |
William A. Frutiger, Kenneth E. Williams |
1984-05-01 |
| 4382186 |
Process and apparatus for converged fine line electron beam treatment of objects |
William A. Frutiger, Kenneth E. Williams |
1983-05-03 |