JC

Jiong Cheng

AT Axcelis Technologies: 1 patents #165 of 300Top 60%
Overall (All Time): #3,623,698 of 4,157,543Top 90%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6101971 Ion implantation control using charge collection, optical emission spectroscopy and mass analysis A. Stuart Denholm, Michael Graf, Peter L. Kellerman, George Stejic 2000-08-15