Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10030304 | Ion implantation apparatus and method of cleaning ion implantation apparatus | Takayuki Nagai | 2018-07-24 |
| 9659749 | Beam extraction slit structure and ion source | — | 2017-05-23 |
| 9659755 | Plasma generator and thermal electron emitter | — | 2017-05-23 |
| 9502759 | Antenna cover and plasma generating device using same | Shiro Ninomiya | 2016-11-22 |
| 9425023 | Ion generator and thermal electron emitter | — | 2016-08-23 |
| 9318298 | Ion generator and ion generating method | — | 2016-04-19 |
| 9281160 | Insulation structure and insulation method | — | 2016-03-08 |
| 9208983 | Ion generation method and ion source | — | 2015-12-08 |
| 9153405 | Ion source device and ion beam generating method | — | 2015-10-06 |
| 9153406 | Supporting structure and ion generator using the same | — | 2015-10-06 |
| 9117630 | Insulation structure of high voltage electrodes for ion implantation apparatus | Hiroshi Matsushita | 2015-08-25 |
| 7947129 | Ion source apparatus and cleaning optimized method thereof | Hirohiko Murata | 2011-05-24 |
| 7012263 | Ion source apparatus and electronic energy optimized method therefor | Hirohiko Murata | 2006-03-14 |
| 6060718 | Ion source having wide output current operating range | Adam Brailove | 2000-05-09 |
| 5657531 | Magnetic head arm, method of producing the same and apparatus for producing the same | Yasuo Warita, Seiichi Sugano, Toshiji Fujimori | 1997-08-19 |
| 4914292 | Ion implanting apparatus | Tadamoto Tamai | 1990-04-03 |
| 4904902 | Ion implanting system | Tadamoto Tamai | 1990-02-27 |