Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7399154 | Vacuum processing system being able to carry process object into and out of vacuum chamber | — | 2008-07-15 |
| 6313469 | Substrate handling apparatus and ion implantation apparatus | — | 2001-11-06 |
| 5929456 | Ion implantation system and method adapted for serial wafer processing | — | 1999-07-27 |
| 5702228 | Robotic arm supporting an object by interactive mechanism | Toshitaka Yamamoto | 1997-12-30 |
| 5512106 | Surface cleaning with argon | Yoichiro IKEYA | 1996-04-30 |
| 5046992 | Robot arm capable of three-dimensionally moving a robot arm member | Keiji Okada | 1991-09-10 |
| 5030835 | Ion implantation capable of uniformly injecting an ion beam into a substrate | Junichi Murakami | 1991-07-09 |
| 4994674 | Ion implantation apparatus capable of avoiding electrification of a substrate | Junichi Murakami | 1991-02-19 |
| 4914292 | Ion implanting apparatus | Masateru Sato | 1990-04-03 |
| 4904902 | Ion implanting system | Masateru Sato | 1990-02-27 |