Issued Patents All Time
Showing 51–75 of 78 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128110 | Method to enhance growth rate for selective epitaxial growth | Abhishek Dube, Xuebin Li, Yi-Chiau Huang, Hua Chung | 2018-11-13 |
| 10115607 | Method and apparatus for wafer outgassing control | Xinyu BAO, Chun YAN, Hua Chung | 2018-10-30 |
| 10090147 | Integrated system and method for source/drain engineering | Chun Yan, Xinyu BAO, Melitta Hon, Hua Chung | 2018-10-02 |
| 10062598 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2018-08-28 |
| 10043667 | Integrated method for wafer outgassing reduction | Chun YAN, Xinyu BAO, Hua Chung | 2018-08-07 |
| 9959610 | System and method to detect substrate and/or substrate support misalignment using imaging | Leonid M. Tertitski, Shay Assaf, Kim Vellore, Zhepeng CONG | 2018-05-01 |
| 9929055 | Method to grow thin epitaxial films at low temperature | Abhishek Dube, Hua Chung, Jenn-Yue Wang, Xuebin Li, Yi-Chiau Huang | 2018-03-27 |
| 9923081 | Selective process for source and drain formation | Xinyu BAO, Zhiyuan Ye, Flora Fong-Song CHANG, Abhishek Dube, Xuebin Li +2 more | 2018-03-20 |
| 9881790 | Method to enhance growth rate for selective epitaxial growth | Abhishek Dube, Xuebin Li, Yi-Chiau Huang, Hua Chung | 2018-01-30 |
| 9768013 | Apparatus and method for selective deposition | Abhishek Dube, Jessica S. Kachian, David Thompson, Jeffrey W. Anthis | 2017-09-19 |
| 9650726 | Methods and apparatus for deposition processes | Nyi O. Myo, Kevin Joseph Bautista, Zhiyuan Ye, Yihwan Kim | 2017-05-16 |
| 9530638 | Method to grow thin epitaxial films at low temperature | Abhishek Dube, Hua Chung, Jenn-Yue Wang, Xuebin Li, Yi-Chiau Huang | 2016-12-27 |
| 9032906 | Apparatus and process for plasma-enhanced atomic layer deposition | Paul F. Ma, Kavita Shah, Dien-Yeh Wu, Seshadri Ganguli, Christophe Marcadal +1 more | 2015-05-19 |
| 9011973 | Methods for depositing oxygen deficient metal films | Er-Xuan Ping, Yoshihide Senzaki | 2015-04-21 |
| 8951478 | Ampoule with a thermally conductive coating | Christophe Marcadal, Seshadri Ganguli, Norman Nakashima, Dien-Yeh Wu | 2015-02-10 |
| 8815724 | Process for forming cobalt-containing materials | Seshadri Ganguli, Mei Chang, Sang Ho Yu, Kevin Moraes, See-Eng Phan | 2014-08-26 |
| 8110489 | Process for forming cobalt-containing materials | Seshadri Ganguli, Mei Chang, Sang Ho Yu, Kevin Moraes, See-Eng Phan | 2012-02-07 |
| 7989339 | Vapor deposition processes for tantalum carbide nitride materials | Kavita Shah, Haichun Yang | 2011-08-02 |
| 7850779 | Apparatus and process for plasma-enhanced atomic layer deposition | Paul F. Ma, Kavita Shah, Dien-Yeh Wu, Seshadri Ganguli, Christophe Marcadal +1 more | 2010-12-14 |
| 7832432 | Chemical delivery apparatus for CVD or ALD | Norman Nakashima, Christophe Marcadal, Seshadri Ganguli, Paul F. Ma | 2010-11-16 |
| 7833358 | Method of recovering valuable material from exhaust gas stream of a reaction chamber | Frederick Wu, Christophe Marcadal, Seshadri Ganguli, Dien-Yeh Wu, Kavita Shah +1 more | 2010-11-16 |
| 7780789 | Vortex chamber lids for atomic layer deposition | Dien-Yeh Wu, Puneet Bajaj, Xiaoxiong Yuan, Steven H. Kim, Paul F. Ma +1 more | 2010-08-24 |
| 7748400 | Chemical delivery apparatus for CVD or ALD | Norman Nakashima, Christophe Marcadal, Seshadri Ganguli, Paul F. Ma | 2010-07-06 |
| 7682946 | Apparatus and process for plasma-enhanced atomic layer deposition | Paul F. Ma, Kavita Shah, Dien-Yeh Wu, Seshadri Ganguli, Christophe Marcadal +1 more | 2010-03-23 |
| 7678298 | Tantalum carbide nitride materials by vapor deposition processes | Kavita Shah, Haichun Yang | 2010-03-16 |