Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818585 | In situ plasma clean for removal of residue from pedestal surface without breaking vacuum | Richard Green, Cheng-Hsiung Tsai, Shambhu N. Roy, David H. Loo | 2017-11-14 |
| 9023227 | Increased deposition efficiency and higher chamber conductance with source power increase in an inductively coupled plasma (ICP) chamber | Jivko Dinev, Saravjeet Singh, Khalid Mohiuddin Sirajuddin, Tong Liu, Rohit Mishra +3 more | 2015-05-05 |
| 8987140 | Methods for etching through-silicon vias with tunable profile angles | Tong Liu, Khalid Mohiuddin Sirajuddin | 2015-03-24 |
| 8900471 | In situ plasma clean for removal of residue from pedestal surface without breaking vacuum | Richard Green, Cheng-Hsiung Tsai, Shambhu N. Roy, David H. Loo | 2014-12-02 |
| 8221602 | Non-contact process kit | Karl M. Brown | 2012-07-17 |
| 7780789 | Vortex chamber lids for atomic layer deposition | Dien-Yeh Wu, Xiaoxiong Yuan, Steven H. Kim, Schubert S. Chu, Paul F. Ma +1 more | 2010-08-24 |