Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818585 | In situ plasma clean for removal of residue from pedestal surface without breaking vacuum | Richard Green, Cheng-Hsiung Tsai, Shambhu N. Roy, Puneet Bajaj | 2017-11-14 |
| 8900471 | In situ plasma clean for removal of residue from pedestal surface without breaking vacuum | Richard Green, Cheng-Hsiung Tsai, Shambhu N. Roy, Puneet Bajaj | 2014-12-02 |
| 6875927 | High temperature DC chucking and RF biasing cable with high voltage isolation for biasable electrostatic chuck applications | Karl M. Brown, Cheng-Hsiung Tsai, Donny Young, Vineet Haresh Mehta | 2005-04-05 |
| 6625003 | Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck | Jr-Jyan Chen, Kenny King-Tai Ngan, Bradley O. Stimson | 2003-09-23 |
| 5818682 | Method and apparatus for optimizing a dechucking period used to dechuck a workpiece from an electrostatic chuck | — | 1998-10-06 |