| 9818585 |
In situ plasma clean for removal of residue from pedestal surface without breaking vacuum |
Richard Green, Cheng-Hsiung Tsai, Shambhu N. Roy, Puneet Bajaj |
2017-11-14 |
| 8900471 |
In situ plasma clean for removal of residue from pedestal surface without breaking vacuum |
Richard Green, Cheng-Hsiung Tsai, Shambhu N. Roy, Puneet Bajaj |
2014-12-02 |
| 6875927 |
High temperature DC chucking and RF biasing cable with high voltage isolation for biasable electrostatic chuck applications |
Karl M. Brown, Cheng-Hsiung Tsai, Donny Young, Vineet Haresh Mehta |
2005-04-05 |
| 6625003 |
Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck |
Jr-Jyan Chen, Kenny King-Tai Ngan, Bradley O. Stimson |
2003-09-23 |
| 5818682 |
Method and apparatus for optimizing a dechucking period used to dechuck a workpiece from an electrostatic chuck |
— |
1998-10-06 |
