Issued Patents All Time
Showing 76–78 of 78 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7585762 | Vapor deposition processes for tantalum carbide nitride materials | Kavita Shah, Haichun Yang | 2009-09-08 |
| 7568495 | Chemical delivery apparatus for CVD or ALD | Norman Nakashima, Christophe Marcadal, Seshadri Ganguli, Paul F. Ma | 2009-08-04 |
| 7562672 | Chemical delivery apparatus for CVD or ALD | Norman Nakashima, Christophe Marcadal, Seshadri Ganguli, Paul F. Ma | 2009-07-21 |