Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12338547 | Method for forming silicon-phosphorous materials | Errol Antonio C. Sanchez, Mark Saly, Schubert S. Chu, Abhishek Dube | 2025-06-24 |
| 11965241 | Cluster tools, systems, and methods having one or more pressure stabilization chambers | Saurabh Chopra, Martin Jeffrey Salinas, Masato Ishii, Sheng-Chen Twan | 2024-04-23 |
| 11649560 | Method for forming silicon-phosphorous materials | Errol Antonio C. Sanchez, Mark Saly, Schubert S. Chu, Abhishek Dube | 2023-05-16 |
| 10170321 | Aluminum content control of TiAIN films | Wenyu Zhang, Wei V. Tang, Yixiong Yang, CHEN-HAN LIN, Yi Xu +8 more | 2019-01-01 |