Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D931241 | Lower shield for a substrate processing chamber | Sarath Babu, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2021-09-21 |
| 11043406 | Two piece shutter disk assembly with self-centering feature | Cheng-Hsiung Tsai, Sarath Babu | 2021-06-22 |
| 10971383 | Fluorescence based thermometry for packaging applications | Preetham Rao | 2021-04-06 |
| D913979 | Inner shield for a substrate processing chamber | Sarath Babu, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2021-03-23 |
| 10950475 | Method and apparatus for processing a substrate using non-contact temperature measurement | Vinodh Ramachandran, Cheng-Hsiung Tsai, Yueh Sheng Ow, Preetham Rao, Ribhu Gautam +1 more | 2021-03-16 |
| 10945313 | Methods and apparatus for a microwave batch curing process | Saket Rathi, Mukund Sundararajan, Manjunath H. Venkataswamappa | 2021-03-09 |
| 10851453 | Methods and apparatus for shutter disk assembly detection | Cheng-Hsiung Tsai, Eiji Asahina, Sarath Babu | 2020-12-01 |
| 10677830 | Methods and apparatus for detecting microwave fields in a cavity | Yueh Sheng Ow, Jacob Newman, Preetham Rao, Yuichi Wada, Vinodh Ramachandran | 2020-06-09 |
| 10629430 | Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications | Loke Yuen Wong, Ke Chang, Yueh Sheng Ow, Glen T. Mori, Aksel Kitowski +1 more | 2020-04-21 |
| 10600664 | Fluorescence based thermometry for packaging applications | Preetham Rao | 2020-03-24 |
| 10373860 | Batch processing apparatus | Mukund Sundararajan, Manjunatha Koppa, Saket Rathi | 2019-08-06 |
| 10115573 | Apparatus for high compressive stress film deposition to improve kit life | Junqi Wei, Kirankumar Neelasandra SAVANDAIAH, Zhitao Cao, Yueh Sheng Ow | 2018-10-30 |
| 9960035 | Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications | Loke Yuen Wong, Ke Chang, Yueh Sheng Ow, Glen T. Mori, Aksel Kitowski +1 more | 2018-05-01 |
| 9960023 | Methods and apparatus for nodule control in a titanium-tungsten target | Junqi Wei, Zhitao Cao, Yueh Sheng Ow, Kirankumar Neelasandra SAVANDAIAH, Xin Wang +1 more | 2018-05-01 |
| 9548200 | Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications | Loke Yuen Wong, Ke Chang, Yueh Sheng Ow, Glen T. Mori, Aksel Kitowski +1 more | 2017-01-17 |
| 9340866 | Substrate support with radio frequency (RF) return path | Alan A. Ritchie, Donny Young, Wei Wang, Thanh X. Nguyen, Kirankumar Neelasandra SAVANDAIAH | 2016-05-17 |
| 9252002 | Two piece shutter disk assembly for a substrate process chamber | Cheng-Hsiung Tsai, Robert Dinsmore, Song-Moon Suh | 2016-02-02 |
| 8895450 | Low resistivity tungsten PVD with enhanced ionization and RF power coupling | Yong Cao, Xianmin Tang, Srinivas Gandikota, Wei Wang, Zhendong Liu +3 more | 2014-11-25 |
| 8558299 | Semiconductor device with gate electrode stack including low resistivity tungsten and method of forming | Yong Cao, Xianmin Tang, Srinivas Gandikota, Wei Wang, Zhendong Liu +3 more | 2013-10-15 |