Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9267254 | Flood protection system | — | 2016-02-23 |
| 7722737 | Gas distribution system for improved transient phase deposition | Sudhir Gondhalekar, Robert Duncan, Siamak Salimian, Muhammad M. Rasheed, Harry Whitesell +2 more | 2010-05-25 |
| 6958098 | Semiconductor wafer support lift-pin assembly | Thomas Cho, Lily Pang, Michael P. Karazim, Tetsuya Ishikawa | 2005-10-25 |
| 6776875 | Semiconductor substrate support assembly having lobed o-rings therein | Thomas Cho, Tetsuya Ishikawa | 2004-08-17 |
| 6572708 | Semiconductor wafer support lift-pin assembly | Thomas Cho, Lily Pang, Michael P. Karazim, Tetsuya Ishikawa | 2003-06-03 |
| 6192829 | Antenna coil assemblies for substrate processing chambers | Michael P. Karazim, Tetsuya Ishikawa, Thomas Kring, Pavel Staryuk, Abhi Desai +2 more | 2001-02-27 |
| 5558956 | System for isolating batteries during testing | Clifford B. Simpson | 1996-09-24 |