Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11260498 | Method of polishing a new or a refurbished electrostatic chuck | William M. Lu, Stacy Meyer | 2022-03-01 |
| 10879046 | Substrate support with real time force and film stress control | Govinda Raj, Matthew J. Busche | 2020-12-29 |
| 10557202 | Method of processing a substrate support assembly | Vijay D. Parkhe, Senh Thach | 2020-02-11 |
| 10347522 | Method to remove residual charge on a electrostatic chuck during the de-chucking step | Tom K. Cho, Robert T. Hirahara | 2019-07-09 |
| 9805965 | Pixelated capacitance controlled ESC | Reza Sadjadi, Vijay D. Parkhe, Maxim Mikhailovich Noginov | 2017-10-31 |
| 9580806 | Method of processing a substrate support assembly | Vijay D. Parkhe, Sehn Thach | 2017-02-28 |
| 9536769 | Pixelated capacitance controlled ESC | Reza Sadjadi, Vijay D. Parkhe, Maxim Mikhailovich Noginov | 2017-01-03 |
| 9472410 | Pixelated capacitance controlled ESC | Reza Sadjadi, Vijay D. Parkhe, Maxim Mikhailovich Noginov | 2016-10-18 |