Shadow ring lift plate

Assignee

• Applied Materials

Inventors

• Zubin Huang (26 patents)
• Srinivas Tokur Mohana (3 patents)
• Shreyas Patil Shanthaveeraswamy (5 patents)
• Sandesh Yadamane (7 patents)
• Jallepally Ravi (32 patents)
• Harpreet Singh (85 patents)
• Manjunatha Koppa (22 patents)

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