Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897131 | Advances in spike anneal processes for ultra shallow junctions | Balasubramanian Ramachandran, Ravi Jallepally, Ryan Boas, Amir Al-Bayati, Houda Graoui +1 more | 2005-05-24 |
| 6888104 | Thermally matched support ring for substrate processing chamber | Joseph M. Ranish, Aaron Muir Hunter, Balasubramanian Ramachandran, Jallepally Ravi, Vedapuram S. Achutharaman +1 more | 2005-05-03 |
| 6803546 | Thermally processing a substrate | Ryan Boas, Ajit Balakrishna, Benjamin Bierman, Brian Haas, Dean Jennings +2 more | 2004-10-12 |