Issued Patents All Time
Showing 76–86 of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7151881 | Impurity-based waveguide detectors | Lawrence C. West, Thomas P. Pearsall, Francisco Leon | 2006-12-19 |
| 7075165 | Embedded waveguide detectors | Francisco Leon, Lawrence C. West, Yuichi Wada, Gregory L. Wojcik | 2006-07-11 |
| 6919150 | Structures useful in electron beam lithography | Cheng Guo | 2005-07-19 |
| 6909588 | Substrate holder for retaining a substrate within a processing chamber | — | 2005-06-21 |
| 6746805 | Methods for fabricating lithography apparatus | Cheng Guo | 2004-06-08 |
| 6515408 | Ion beam apparatus and a method for neutralizing space charge in an ion beam | Jonathan Gerald England, Andrew Holmes, David George Armour, Jaap Van Den Berg | 2003-02-04 |
| 6359286 | Method and apparatus for neutralizing space charge in an ion beam | Hiroyuki Ito | 2002-03-19 |
| 6100536 | Electron flood apparatus for neutralizing charge build-up on a substrate during ion implantation | Hiroyuki Ito, Xue-Yu Qian, Robert J. Mitchell | 2000-08-08 |
| 5969366 | Ion implanter with post mass selection deceleration | Jonathan Gerald England, David George Armour, Majeed A. Foad | 1999-10-19 |
| 5883391 | Ion implantation apparatus and a method of monitoring high energy neutral contamination in an ion implantation process | Babak Adibi, Jonathan Gerald England, Jose Antonio Marin | 1999-03-16 |
| 4825087 | System and methods for wafer charge reduction for ion implantation | Anthony Renau, Frederick Plumb | 1989-04-25 |