Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048806 | Methods to avoid unstable plasma states during a process transition | Daniel J. Hoffman, Gerardo Delgadino, Ezra Robert Gold, Ashok Sinha, Xiaoye Zhao +2 more | 2011-11-01 |
| 7987814 | Lower liner with integrated flow equalizer and improved conductance | James D. Carducci, Andrew Nguyen, Ajit Balakrishna | 2011-08-02 |
| 7780866 | Method of plasma confinement for enhancing magnetic control of plasma radial distribution | Matthew L. Miller, Daniel J. Hoffman, Steven C. Shannon, James D. Carducci, Andrew Nguyen | 2010-08-24 |
| 7674353 | Apparatus to confine plasma and to enhance flow conductance | Kallol Bera, Daniel J. Hoffman, Yan Ye, Douglas A. Buchberger, Jr. | 2010-03-09 |
| 7618516 | Method and apparatus to confine plasma and to enhance flow conductance | Kallol Bera, Daniel J. Hoffman, Yan Ye, Douglas A. Buchberger, Jr. | 2009-11-17 |