Integrated substrate measurement system

Assignee

• Applied Materials

Inventors

• Patricia A. Schulze (5 patents)
• Gregory John Freeman (9 patents)
• Michael Kutney (30 patents)
• Arunkumar Ramachandraiah (4 patents)
• Chih Chung Chou (30 patents)
• Zhaozhao Zhu (17 patents)
• Ozkan Celik (8 patents)

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