Spatial optical emission spectroscopy for etch uniformity

Assignee

• Applied Materials

Inventors

• Blake Erickson (20 patents)
• Keith R. Berding (41 patents)
• Michael Kutney (30 patents)
• Zhaozhao Zhu (17 patents)
• Tsung Feng Wu (4 patents)
• Michael D. Willwerth (52 patents)
• Jeffrey Ludwig (7 patents)

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