Issued Patents All Time
Showing 26–50 of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508375 | Modification of magnetic properties of films using ion and neutral beam implantation | Nir Merry | 2016-11-29 |
| 9354508 | Planarized extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor | Cara Beasley, Ralf Hofmann, Timothy Michaelson | 2016-05-31 |
| 9343347 | Portable electrostatic chuck carrier for thin substrates | Dieter Haas, Ralf Hofmann | 2016-05-17 |
| 9263078 | Patterning of magnetic thin film using energized ions | Steven Verhaverbeke, Omkaram Nalamasu, Mahalingam Venkatesan, Nety M. Krishna | 2016-02-16 |
| 9206512 | Gas distribution system | Hanh Nguyen, Dieter Haas, Karl J. Armstrong, Xiaoxiong Yuan | 2015-12-08 |
| 9018110 | Apparatus and methods for microwave processing of semiconductor substrates | Michael W. Stowell, Ralf Hofmann, Wolfgang Aderhold, Stephen Moffatt | 2015-04-28 |
| 8927400 | Safe handling of low energy, high dose arsenic, phosphorus, and boron implanted wafers | Manoj Vellaikal, Kartik Santhanam | 2015-01-06 |
| 8900405 | Plasma immersion ion implantation reactor with extended cathode process ring | Peter I. Porshnev, Kartik Ramaswamy, Biagio Gallo, Hiroji Hanawa, Andrew Nguyen +2 more | 2014-12-02 |
| 8747942 | Carbon nanotube-based solar cells | Omkaram Nalamasu, Charles Gay, Victor L. Pushparaj, Kaushal K. Singh, Robert Jan Visser +1 more | 2014-06-10 |
| 8709924 | Method for conformal plasma immersed ion implantation assisted by atomic layer deposition | Hiroji Hanawa, Seon-Mee Cho | 2014-04-29 |
| 8642128 | Enhanced scavenging of residual fluorine radicals using silicon coating on process chamber walls | Dongwon Choi, Dong-Hyung LEE, Tze Wing Poon, Manoj Vellaikal, Peter I. Porshnev | 2014-02-04 |
| 8551578 | Patterning of magnetic thin film using energized ions and thermal excitation | Omkaram Nalamasu, Steven Verhaverbeke, Mahalingam Venkatesan, Nety M. Krishna | 2013-10-08 |
| 8535766 | Patterning of magnetic thin film using energized ions | Steven Verhaverbeke, Omkaram Nalamasu, Mahalingam Venkatesan, Nety M. Krishna | 2013-09-17 |
| 8431911 | HDD pattern apparatus using laser, E-beam, or focused ion beam | Stephen Moffatt | 2013-04-30 |
| 8354035 | Method for removing implanted photo resist from hard disk drive substrates | Martin A. Hilkene, Matthew D. Scotney-Castle, Roman Gouk, Steven Verhaverbeke, Peter I. Porshnev | 2013-01-15 |
| 8316867 | Electrostatic chuck cleaning during semiconductor substrate processing | Dean Jennings, Jonathan Simmons | 2012-11-27 |
| 8317970 | Ceiling electrode with process gas dispersers housing plural inductive RF power applicators extending into the plasma | Canfeng Lai, Lily Pang | 2012-11-27 |
| 8288257 | Doping profile modification in P3I process | Matthew D. Scotney-Castle, Peter I. Porshnev | 2012-10-16 |
| 8273624 | Plasma immersed ion implantation process using balanced etch-deposition process | Peter I. Porshnev | 2012-09-25 |
| 8198180 | Ion implanted substrate having capping layer and method | Jose Ignacio del Agua Borniquel, Tze Wing Poon, Robert Schreutelkamp | 2012-06-12 |
| 8168519 | Plasma immersion ion implantation method using a pure or nearly pure silicon seasoning layer on the chamber interior surfaces | Shijian Li, Kartik Ramaswamy, Hiroji Hanawa, Seon-Mee Cho, Biagio Gallo +1 more | 2012-05-01 |
| 8129261 | Conformal doping in P3I chamber | Peter I. Porshnev, Matthew D. Scotney-Castle | 2012-03-06 |
| 8003500 | Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking | Manoj Vellaikal, Kartik Santhanam, Yen B. Ta, Martin A. Hilkene, Matthew D. Scotney-Castle +2 more | 2011-08-23 |
| 7993465 | Electrostatic chuck cleaning during semiconductor substrate processing | Dean Jennings, Jonathon Yancey Simmons | 2011-08-09 |
| 7989329 | Removal of surface dopants from a substrate | Kartik Ramaswamy, Kenneth S. Collins, Biagio Gallo, Hiroji Hanawa, Martin A. Hilkene +2 more | 2011-08-02 |