Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8702870 | Superimposition of rapid periodic and extensive post multiple substrate UV-ozone clean sequences for high throughput and stable substrate to substrate performance | Kelvin Chan, Thomas Nowak, Alexandros T. Demos | 2014-04-22 |
| 8596336 | Substrate support temperature control | Richard Fovell, Paul Brillhart, Anisul Khan, Jivko Dinev, Shane C. Nevil | 2013-12-03 |
| 7368392 | Method of fabricating a gate structure of a field effect transistor having a metal-containing gate electrode | Jinhan Choi, Shashank Deshmukh, Kyeong-Tae Lee | 2008-05-06 |
| 7297376 | Method to reduce gas-phase reactions in a PECVD process with silicon and organic precursors to deposit defect-free initial layers | Kang Sub Yim, Kelvin Chan, Nagarajan Rajagopalan, Josephine Ju-Hwei Chang Liu, Sang-Hoon Ahn +3 more | 2007-11-20 |
| 6638874 | Methods used in fabricating gates in integrated circuit device structures | Seowoo Nam, Kenlin Huang, Padmapani Nallan | 2003-10-28 |