Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7297376 | Method to reduce gas-phase reactions in a PECVD process with silicon and organic precursors to deposit defect-free initial layers | Kang Sub Yim, Kelvin Chan, Nagarajan Rajagopalan, Sang-Hoon Ahn, Yi Zheng +3 more | 2007-11-20 |
| 7259381 | Methodology for determining electron beam penetration depth | Alexandros T. Demos, Hichem M'Saad | 2007-08-21 |