Cleaning assemblies for substrate processing chambers

Assignee

• Applied Materials

Inventors

• Yuxing Zhang (19 patents)
• Tuan Nguyen (180 patents)
• Amit Kumar BANSAL (84 patents)
• Nitin Pathak (13 patents)
• Saket Rathi (15 patents)
• Thomas Rubio (6 patents)
• Udit S. Kotagi (2 patents)
• Badri Narayan Ramamurthi (30 patents)
• Dharma Ratnam Srichurnam (4 patents)

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