Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10498948 | Methods and apparatus for absolute and relative depth measurements using camera focus distance | Ozkan Celik, Patricia A. Schulze, Gregory John Freeman, Tommaso Vercesi | 2019-12-03 |
| 10453725 | Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same | — | 2019-10-22 |
| 10087544 | Microelectronic substrate electro processing system | Robert B. Moore, David Silvetti, Randy Harris | 2018-10-02 |
| 9799544 | Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing | — | 2017-10-24 |
| 9399827 | Microelectronic substrate electro processing system | Robert B. Moore, David Silvetti, Randy Harris | 2016-07-26 |
| 9245767 | Anneal module for semiconductor wafers | Vincent Steffan Francischetti, Gregory J. Wilson, Kyle M. Hanson, Robert B. Moore | 2016-01-26 |
| 7934898 | High throughput semiconductor wafer processing | Randy Harris, Steve Eudy | 2011-05-03 |
| 7541299 | Method and apparatus for thermally processing microelectronic workpieces | Jeffry Davis | 2009-06-02 |
| 7531060 | Integrated tool assemblies with intermediate processing modules for processing of microfeature workpieces | Daniel J. Woodruff | 2009-05-12 |
| 7337663 | Sonic energy process chamber | Dana Scranton, Brian Aegerter | 2008-03-04 |
| 7144813 | Method and apparatus for thermally processing microelectronic workpieces | Jeffry Davis | 2006-12-05 |
| 6969682 | Single workpiece processing system | Kyle M. Hanson, Steven L. Peace, Jon Kuntz, Scott Bruner | 2005-11-29 |
| 6930046 | Single workpiece processing system | Kyle M. Hanson, Eric Lund, Coby Scott GROVE, Steven L. Peace, Scott Bruner +1 more | 2005-08-16 |
| 6806194 | Apparatus and methods for processing a workpiece | Steven L. Peace, Erik Lund | 2004-10-19 |
| 6680253 | Apparatus for processing a workpiece | Steven L. Peace | 2004-01-20 |
| 6548411 | Apparatus and methods for processing a workpiece | Steven L. Peace, Erik Lund | 2003-04-15 |
| 6511914 | Reactor for processing a workpiece using sonic energy | Steven L. Peace | 2003-01-28 |
| 6492284 | Reactor for processing a workpiece using sonic energy | Steven L. Peace, Eric Lund | 2002-12-10 |