Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114282 | Phased array modular high-frequency source | Philip Allan Kraus, Thai Cheng Chua, Christian Amormino | 2021-09-07 |
| 11081318 | Geometrically selective deposition of dielectric films utilizing low frequency bias | Kenichi Ohno, Keiichi Tanaka, Li-Qun Xia, Tsutomu Tanaka, Mario David Silvetti +4 more | 2021-08-03 |
| 10854428 | Spatial atomic layer deposition chamber with plasma pulsing to prevent charge damage | Tsutomu Tanaka, Alexander V. Garachtchenko, Keiichi Tanaka | 2020-12-01 |
| 10763085 | Shaped electrodes for improved plasma exposure from vertical plasma source | Kallol Bera, Anantha K. Subramani, John C. Forster, Tsutomu Tanaka | 2020-09-01 |
| 10720311 | Phased array modular high-frequency source | Philip Allan Kraus, Thai Cheng Chua, Christian Amormino | 2020-07-21 |
| 10504699 | Phased array modular high-frequency source | Philip Allan Kraus, Thai Cheng Chua, Christian Amormino | 2019-12-10 |
| 10312120 | Position and temperature monitoring of ALD platen susceptor | Abraham Ravid, Kevin Griffin, Joseph Yudovsky, Kaushal Gangakhedkar, Alex Minkovich | 2019-06-04 |
| 10234261 | Fast and continuous eddy-current metrology of a conductive film | Edward W. Budiarto, Todd Egan, Jeffrey C. Hudgens, Nir Merry | 2019-03-19 |
| 9986598 | Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods | Matthew J. Busche, Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Michael R. Rice, Leon Volfovski | 2018-05-29 |
| 9631919 | Non-contact sheet resistance measurement of barrier and/or seed layers prior to electroplating | Abraham Ravid, Todd Egan, Robert O. Miller | 2017-04-25 |
| 9335151 | Film measurement | Edward W. Budiarto, Todd Egan | 2016-05-10 |
| 8880210 | Methods and apparatus for processing substrates using model-based control | Keith Brian Porthouse, John W. Lane, Mariusch Gregor, Nir Merry, Michael R. Rice +2 more | 2014-11-04 |