Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Paired dynamic parallel plate capacitively coupled plasmas

Paired dynamic parallel plate capacitively coupled plasmas

US Patent 11923172 · Granted Mar 5, 2024

Estimated economic value: $73,319,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Gas distribution plate2025
Gas distribution plate2025
Methods of operating a spatial deposition tool2025
Method of tuning film properties of metal nitride using plasma2025
Semiconductor processing chambers and methods for deposition and etch2025
Plasma showerhead assembly and method of reducing defects2025
High conductance variable orifice valve2025
Plasma source with floating electrodes2025
Plasma-enhanced deposition of film stacks2025
Gas distribution plate2025
Servo amplifier2025
Gas mixer2025