Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11622419 | Azimuthally tunable multi-zone electrostatic chuck | Chunlei Zhang, Phillip Criminale, Steven E. Babayan | 2023-04-04 | $41,324,000 |
| 10440777 | Azimuthally tunable multi-zone electrostatic chuck | Chunlei Zhang, Phillip Criminale, Steven E. Babayan | 2019-10-08 | $26,143,000 |