Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11622419 | Azimuthally tunable multi-zone electrostatic chuck | Chunlei Zhang, Phillip Criminale, Steven E. Babayan | 2023-04-04 |
| 10440777 | Azimuthally tunable multi-zone electrostatic chuck | Chunlei Zhang, Phillip Criminale, Steven E. Babayan | 2019-10-08 |