Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Integrated platen assembly for a chemical mechanical planarization system

Integrated platen assembly for a chemical mechanical planarization system

US Patent 6837964 · Granted Jan 4, 2005

Estimated economic value: $20,484,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Showerhead assembly with recursive gas channels2025
Multizone gas distribution plate for trench profile optimization2025
Methods and apparatus for conductance liners in semiconductor process chambers2025
Porous plug for electrostatic chuck gas delivery2025
Tunable temperature controlled substrate support assembly2025
Baffle for anti-rotation process kit for substrate processing chamber2025
Conditioning of a processing chamber2025
Lift pin mechanism2025
Plasma resistant arc preventative coatings for manufacturing equipment component2025
Collaborative robot system on a mobile cart with a chamber docking system2025
Ring for an anti-rotation process kit for a substrate processing chamber2024
Substrate processing system including coil with RF powered faraday shield2024