Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8322045 | Single wafer apparatus for drying semiconductor substrates using an inert gas air-knife | Younes Achkire, Timothy Joseph Franklin, Julia Svirchevski, Dan Marohl | 2012-12-04 |