Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635157 | Electro-chemical deposition system | Yezdi Dordi, Donald Olgado, Ratson Morad, Peter Hey, Mark Denome +10 more | 2003-10-21 |
| 6568896 | Transfer chamber with side wall port | Timothy Joseph Franklin | 2003-05-27 |
| 6503131 | Integrated platen assembly for a chemical mechanical planarization system | Timothy Joseph Franklin | 2003-01-07 |
| 6409453 | End effector for wafer handler in processing system | Jeff Brodine | 2002-06-25 |
| 6267423 | End effector for semiconductor wafer transfer device and method of moving a wafer with an end effector | Kenny King-Tai Ngan | 2001-07-31 |
| 6263587 | Degassing method using simultaneous dry gas flux pressure and vacuum | Ivo Raaijmakers | 2001-07-24 |
| 6258220 | Electro-chemical deposition system | Yezdi Dordi, Donald Olgado, Ratson Morad, Peter Hey, Mark Denome +10 more | 2001-07-10 |
| 6182376 | Degassing method and apparatus | Ho Seon Shin | 2001-02-06 |
| 6113698 | Degassing method and apparatus | Ivo Raaijmakers | 2000-09-05 |
| 6034863 | Apparatus for retaining a workpiece in a process chamber within a semiconductor wafer processing system | Jeffrey A. Brodine, Tony P. Schiavo, Jr. | 2000-03-07 |
| 5964561 | Compact apparatus and method for storing and loading semiconductor wafer carriers | — | 1999-10-12 |
| 5929373 | High voltage feed through | Tony P. Schiavo, Jr., Jeff Brodine | 1999-07-27 |
| 5860640 | Semiconductor wafer alignment member and clamp ring | Michael Rosenstein | 1999-01-19 |
| 5833426 | Magnetically coupled wafer extraction platform | — | 1998-11-10 |
| 5762748 | Lid and door for a vacuum chamber and pretreatment therefor | Thomas Banholzer, Avi Tepman, Donald M. Mintz | 1998-06-09 |
| 5746460 | End effector for semiconductor wafer transfer device and method of moving a wafer with an end effector | Kenny King-Tai Ngan | 1998-05-05 |
| 5725718 | Clamp ring for domed heated pedestal in wafer processing chamber | Thomas Banholzer | 1998-03-10 |
| 5697427 | Apparatus and method for cooling a substrate | Kenny King-Tai Ngan | 1997-12-16 |
| 5565058 | Lid and door for a vacuum chamber and pretreatment therefor | Thomas Banholzer, Avi Tepman, Donald M. Mintz | 1996-10-15 |
| 5401319 | Lid and door for a vacuum chamber and pretreatment therefor | Thomas Banholzer, Avi Tepman, Donald M. Mintz | 1995-03-28 |