Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5958198 | Clamp ring for domed heated pedestal in wafer processing | Dan Morohl | 1999-09-28 |
| 5762748 | Lid and door for a vacuum chamber and pretreatment therefor | Dan Marohl, Avi Tepman, Donald M. Mintz | 1998-06-09 |
| 5725718 | Clamp ring for domed heated pedestal in wafer processing chamber | Dan Marohl | 1998-03-10 |
| 5565058 | Lid and door for a vacuum chamber and pretreatment therefor | Dan Marohl, Avi Tepman, Donald M. Mintz | 1996-10-15 |
| 5401319 | Lid and door for a vacuum chamber and pretreatment therefor | Dan Marohl, Avi Tepman, Donald M. Mintz | 1995-03-28 |