Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6409453 | End effector for wafer handler in processing system | Dan Marohl | 2002-06-25 |
| 5929373 | High voltage feed through | Tony P. Schiavo, Jr., Dan Marohl | 1999-07-27 |
| 5899653 | Two-stage vacuum bellows | — | 1999-05-04 |