Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087557 | Substrate processing system including coil with RF powered faraday shield | Shen Peng, Anthony Nguyen, Dan Marohl | 2024-09-10 |
| 10854492 | Edge ring assembly for improving feature profile tilting at extreme edge of wafer | William Frederick Bosch, Rajesh Dorai, Brett C. Richardson, James C. Vetter, Patrick Chung | 2020-12-01 |
| 8262920 | Minimization of mask undercut on deep silicon etch | Patrick Chung, Jackie Seto, S. M. Reza Sadjadi | 2012-09-11 |
| 7985688 | Notch stop pulsing process for plasma processing system | Alferd Cofer | 2011-07-26 |
| 7459100 | Methods and apparatus for sequentially alternating among plasma processes in order to optimize a substrate | Adrian Kiermasz, Alferd Cofer | 2008-12-02 |
| 7351664 | Methods for minimizing mask undercuts and notches for plasma processing system | Alferd Cofer, William Frederick Bosch | 2008-04-01 |
| 6383938 | Method of anisotropic etching of substrates | Kevin Yu, Michael Feldbaum, Michel Puech | 2002-05-07 |
| 6287437 | Recessed bonding of target for RF diode sputtering | Mark Feldman | 2001-09-11 |