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Leak detector and method for detecting leaks |
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2020-03-03 |
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Controlling gas partial pressures for process optimization |
Jean-Pierre Desbiolles |
2012-10-30 |
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Device for fabricating a mask by plasma etching a semiconductor substrate |
Martial Chabloz |
2011-05-10 |
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Apparatus and a method for controlling the depth of etching during alternating plasma etching of semiconductor substrates |
Nicolas Launay |
2011-02-22 |
| 7793685 |
Controlling gas partial pressures for process optimization |
Jean-Pierre Desbiolles |
2010-09-14 |
| 7056842 |
Method and apparatus for non-aggressive plasma-enhanced vapor deposition of dielectric films |
Christophe Jany |
2006-06-06 |
| 6949071 |
Method for exploring and displaying tissue of human or animal origin from a high frequency ultrasound probe |
Amena Saied, Genevieve Berger, Pascal Laugier |
2005-09-27 |
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Use of an ultrasonic transducer for echographic exploration of human or animal body tissues or organs in particular of the eyeball posterior segment |
— |
2005-01-04 |
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System for pumping low thermal conductivity gases |
— |
2003-11-11 |
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Plasma vacuum substrate treatment process and system |
— |
2002-08-13 |
| 6383938 |
Method of anisotropic etching of substrates |
Tamarak Pandhumsoporn, Kevin Yu, Michael Feldbaum |
2002-05-07 |
| 6224326 |
Method and apparatus for preventing deposits from forming in a turbomolecular pump having magnetic or gas bearings |
— |
2001-05-01 |