Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12292262 | System and method for securing a risky geographical area | — | 2025-05-06 |
| 11894254 | Support | — | 2024-02-06 |
| 10062576 | Method for plasma etching a workpiece | Maxine Varvara | 2018-08-28 |
| 7892980 | Apparatus and a method for controlling the depth of etching during alternating plasma etching of semiconductor substrates | Michel Puech | 2011-02-22 |
| 7399710 | Method of controlling the pressure in a process chamber | — | 2008-07-15 |