Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8297311 | Controlling gas partial pressures for process optimization | Michel Puech | 2012-10-30 |
| 7793685 | Controlling gas partial pressures for process optimization | Michel Puech | 2010-09-14 |
| 7790479 | Method and device for monitoring the contamination of substrate wafers | Arnaud Favre, Remi Thollot, Xavier Metais | 2010-09-07 |
| 7568875 | Vacuum interface between a mini-environment pod and a piece of equipment | Catherine Le Guet, Hisanori Kambara, Erwan Godot, Raphael Sylvestre | 2009-08-04 |
| 7468790 | Detecting gaseous species by light-emission spectrometry with spectrum processing | Gloria Sogan, Julien Bounouar, Isabelle Gaurand | 2008-12-23 |
| 7403283 | Detecting minority gaseous species by light-emission spectroscopy | Gloria Sogan, Julien Bounouar, Isabelle Gaurand | 2008-07-22 |
| 7370482 | Rapidly regenerating cryogenic trap | Gloria Sogan, Sebastien Munari, Emmanuelle Veran | 2008-05-13 |
| 7311491 | Molecular drag, turbomolecular, or hybrid pump with an integrated valve | — | 2007-12-25 |