Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8898930 | Method for treating a transport support for the conveyance and atmospheric storage of semiconductor substrates, and treatment station for the implementation of such a method | Erwan Godot, Amaud Favre | 2014-12-02 |
| 7790479 | Method and device for monitoring the contamination of substrate wafers | Arnaud Favre, Xavier Metais, Jean-Pierre Desbiolles | 2010-09-07 |