Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8898930 | Method for treating a transport support for the conveyance and atmospheric storage of semiconductor substrates, and treatment station for the implementation of such a method | Erwan Godot, Remi Thollot | 2014-12-02 |
| 7350544 | Station for controlling and purging a mini-environment | Roland Bernard, Hisanori Kambara | 2008-04-01 |