| 8151816 |
Method and device for removing pollution from a confined environment |
Arnaud Favre, Bertrand Bellet, Xavier Metais |
2012-04-10 |
| 7998426 |
Plasma-based gas treatment system integrated in a vacuum pump |
Philippe Maquin, Thierry Neel |
2011-08-16 |
| 7735648 |
Transport pod with protection by the thermophoresis effect |
Jean-Luc Rival, Hisanori Kambara |
2010-06-15 |
| 7694700 |
Apparatus for transporting substrates under a controlled atmosphere |
Hisanori Kambara, Jean-Luc Rival, Catherine Le Guet |
2010-04-13 |
| 7572110 |
Pumping apparatus using thermal transpiration micropumps |
Hisanori Kambara |
2009-08-11 |
| 7515687 |
Compact source with very bright X-ray beam |
Benoit Barthod |
2009-04-07 |
| 7350544 |
Station for controlling and purging a mini-environment |
Hisanori Kambara, Amaud Favre |
2008-04-01 |
| 7219692 |
Apparatus for conditioning the atmosphere in a chamber |
Eric Chevalier, Gloria Sogan |
2007-05-22 |
| 6910497 |
Semiconductor component manufacturing plant with ventilated false floor |
— |
2005-06-28 |
| 6649019 |
Apparatus for conditioning the atmosphere in a vacuum chamber |
Eric Chevalier, Gloria Sogan |
2003-11-18 |
| 6643014 |
Method and a system for identifying gaseous effluents, and a facility provided with such a system |
Eric Chevalier, Philippe Maquin |
2003-11-04 |
| 6422823 |
Mini-environment control system and method |
Eric Chevalier |
2002-07-23 |
| 6402479 |
Apparatus for pumping out transfer chambers for transferring semiconductor equipment |
Marc Lagedamont, Eric Chevalier |
2002-06-11 |
| 6316045 |
Method and apparatus for conditioning the atmosphere in a process chamber |
Eric Chevalier, Gloria Sogan |
2001-11-13 |
