Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8151816 | Method and device for removing pollution from a confined environment | Arnaud Favre, Bertrand Bellet, Xavier Metais | 2012-04-10 |
| 7998426 | Plasma-based gas treatment system integrated in a vacuum pump | Philippe Maquin, Thierry Neel | 2011-08-16 |
| 7735648 | Transport pod with protection by the thermophoresis effect | Jean-Luc Rival, Hisanori Kambara | 2010-06-15 |
| 7694700 | Apparatus for transporting substrates under a controlled atmosphere | Hisanori Kambara, Jean-Luc Rival, Catherine Le Guet | 2010-04-13 |
| 7572110 | Pumping apparatus using thermal transpiration micropumps | Hisanori Kambara | 2009-08-11 |
| 7515687 | Compact source with very bright X-ray beam | Benoit Barthod | 2009-04-07 |
| 7350544 | Station for controlling and purging a mini-environment | Hisanori Kambara, Amaud Favre | 2008-04-01 |
| 7219692 | Apparatus for conditioning the atmosphere in a chamber | Eric Chevalier, Gloria Sogan | 2007-05-22 |
| 6910497 | Semiconductor component manufacturing plant with ventilated false floor | — | 2005-06-28 |
| 6649019 | Apparatus for conditioning the atmosphere in a vacuum chamber | Eric Chevalier, Gloria Sogan | 2003-11-18 |
| 6643014 | Method and a system for identifying gaseous effluents, and a facility provided with such a system | Eric Chevalier, Philippe Maquin | 2003-11-04 |
| 6422823 | Mini-environment control system and method | Eric Chevalier | 2002-07-23 |
| 6402479 | Apparatus for pumping out transfer chambers for transferring semiconductor equipment | Marc Lagedamont, Eric Chevalier | 2002-06-11 |
| 6316045 | Method and apparatus for conditioning the atmosphere in a process chamber | Eric Chevalier, Gloria Sogan | 2001-11-13 |