Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12216031 | Station and method for measuring airborne molecular contamination | Julien Bounouar, Olivier Le Barillec | 2025-02-04 |
| 11430681 | Device and method for controlling the tightness of a transport enclosure for the conveyance and atmospheric storage of semiconductor substrates | Julien Bounouar, Nicolas Chapel | 2022-08-30 |
| 9816974 | Station and method for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure | Cindy Thovex, Nicolas Chapel | 2017-11-14 |
| 8724078 | Device and method for drying a photomask | Cindy Thovex | 2014-05-13 |
| 8356526 | Contamination measurement station and method for a semiconductor substrates transport pod | Arnaud Favre, Erwan Godot | 2013-01-22 |
| 8151816 | Method and device for removing pollution from a confined environment | Arnaud Favre, Roland Bernard, Xavier Metais | 2012-04-10 |