Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9816974 | Station and method for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure | Nicolas Chapel, Bertrand Bellet | 2017-11-14 |
| 9810617 | Station and method for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure | Julien Bounouar, Arnaud Favre | 2017-11-07 |
| 8724078 | Device and method for drying a photomask | Bertrand Bellet | 2014-05-13 |