Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7789632 | Fast enclosure pumping with power saving | — | 2010-09-07 |
| 7735648 | Transport pod with protection by the thermophoresis effect | Hisanori Kambara, Roland Bernard | 2010-06-15 |
| 7694700 | Apparatus for transporting substrates under a controlled atmosphere | Roland Bernard, Hisanori Kambara, Catherine Le Guet | 2010-04-13 |
| 7160081 | Vacuum pump | — | 2007-01-09 |
| 7095038 | EUV source | Benoit Barthod, Matthieu Morpain | 2006-08-22 |
| 6644942 | Monobloc housing for vacuum pump | Albert Cacard, Francois Houze | 2003-11-11 |