Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854492 | Edge ring assembly for improving feature profile tilting at extreme edge of wafer | Rajesh Dorai, Tamarak Pandhumsoporn, Brett C. Richardson, James C. Vetter, Patrick Chung | 2020-12-01 |
| D784610 | Vaporizer | — | 2017-04-18 |
| 7802539 | Semiconductor processing equipment having improved particle performance | — | 2010-09-28 |
| 7351664 | Methods for minimizing mask undercuts and notches for plasma processing system | Tamarak Pandhumsoporn, Alferd Cofer | 2008-04-01 |
| 6890861 | Semiconductor processing equipment having improved particle performance | — | 2005-05-10 |
| 6828250 | Process for etching vias in organosilicate glass materials without causing RIE lag | Rao Annapragada | 2004-12-07 |
| 6506254 | Semiconductor processing equipment having improved particle performance | Stephen A. Dynan, Marc Shull | 2003-01-14 |
| 5626716 | Plasma etching of semiconductors | Helen Zhu, Syed Haider | 1997-05-06 |
| 5611888 | Plasma etching of semiconductors | Helen Zhu, Syed Haider | 1997-03-18 |