Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Detection and analysis of substrate support and pre-heat ring in a process chamber via imaging

Detection and analysis of substrate support and pre-heat ring in a process chamber via imaging

US Patent 12243761 · Granted Mar 4, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Susceptor improvement2025
Susceptor improvement2025
Modular flow chamber kits, processing chambers, and related apparatus and method2025
Layer with discrete islands formed on a substrate support2025
Layer with discrete islands formed on a substrate support2025
In-situ reflectometry for real-time process control2025
Methods of correlating zones of processing chambers, and related systems and met2025
Process kits and related methods for processing chambers to facilitate depositio2025
Process kits and related methods for processing chambers to facilitate depositio2025
Flow guide structures and heat shield structures, and related methods, for depos2025
Lift assemblies, and related methods and components, for substrate processing ch2025
Methods, systems, and apparatus for monitoring radiation output of lamps2025