| 9119461 |
High stiffness, anti-slip scrubber brush assembly, high-stiffness mandrel, subassemblies, and assembly methods |
Hui Chen, Hung Chih Chen, Jim K. Atkinson |
2015-09-01 |
| 7547243 |
Method of making and apparatus having polishing pad with window |
Andreas Norbert Wiswesser, Ramiel Oshana, Kerry F. Hughes, Jay Rohde, Dominic J. Benvegnu |
2009-06-16 |
| 7503837 |
Composite retaining ring |
Jeonghoon Oh, Hung Chih Chen, Thomas Brezoczky, Douglas R. McAllister |
2009-03-17 |
| 7264536 |
Polishing pad with window |
Andreas Norbert Wiswesser, Ramiel Oshana, Kerry F. Hughes, Jay Rohde, Dominic J. Benvegnu |
2007-09-04 |
| 7186171 |
Composite retaining ring |
Jeonghoon Oh, Hung Chih Chen, Thomas Brezoczky, Douglas R. McAllister |
2007-03-06 |
| 6274854 |
Method and apparatus for baking out a gate valve in a semiconductor processing system |
Timothy Joseph Franklin |
2001-08-14 |
| 6162297 |
Embossed semiconductor fabrication parts |
Donald M. Mintz, Anantha K. Subramani, Lolita Sharp |
2000-12-19 |
| 6000415 |
Method and apparatus for positioning a restrictor shield of a pump in response to an electric signal |
Bret W. Adams, John Jarvis |
1999-12-14 |
| 5965046 |
Method and apparatus for baking out a gate valve in a semiconductor processing system |
Timothy Joseph Franklin |
1999-10-12 |
| 5953827 |
Magnetron with cooling system for process chamber of processing system |
David T. Or, J. Darrel Stickler |
1999-09-21 |
| 5901751 |
Restrictor shield having a variable effective throughout area |
— |
1999-05-11 |
