Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9119461 | High stiffness, anti-slip scrubber brush assembly, high-stiffness mandrel, subassemblies, and assembly methods | Hui Chen, Hung Chih Chen, Jim K. Atkinson | 2015-09-01 |
| 7547243 | Method of making and apparatus having polishing pad with window | Andreas Norbert Wiswesser, Ramiel Oshana, Kerry F. Hughes, Jay Rohde, Dominic J. Benvegnu | 2009-06-16 |
| 7503837 | Composite retaining ring | Jeonghoon Oh, Hung Chih Chen, Thomas Brezoczky, Douglas R. McAllister | 2009-03-17 |
| 7264536 | Polishing pad with window | Andreas Norbert Wiswesser, Ramiel Oshana, Kerry F. Hughes, Jay Rohde, Dominic J. Benvegnu | 2007-09-04 |
| 7186171 | Composite retaining ring | Jeonghoon Oh, Hung Chih Chen, Thomas Brezoczky, Douglas R. McAllister | 2007-03-06 |
| 6274854 | Method and apparatus for baking out a gate valve in a semiconductor processing system | Timothy Joseph Franklin | 2001-08-14 |
| 6162297 | Embossed semiconductor fabrication parts | Donald M. Mintz, Anantha K. Subramani, Lolita Sharp | 2000-12-19 |
| 6000415 | Method and apparatus for positioning a restrictor shield of a pump in response to an electric signal | Bret W. Adams, John Jarvis | 1999-12-14 |
| 5965046 | Method and apparatus for baking out a gate valve in a semiconductor processing system | Timothy Joseph Franklin | 1999-10-12 |
| 5953827 | Magnetron with cooling system for process chamber of processing system | David T. Or, J. Darrel Stickler | 1999-09-21 |
| 5901751 | Restrictor shield having a variable effective throughout area | — | 1999-05-11 |