Use of steam for pre-heating of CMP components

Assignee

• Applied Materials

Inventors

• Haosheng Wu (25 patents)
• Jianshe Tang (49 patents)
• Hari Soundararajan (21 patents)
• Shou-Sung Chang (64 patents)
• Paul D. Butterfield (51 patents)
• Hui Chen (24 patents)
• Chih Chung Chou (30 patents)
• Alexander John Fisher (8 patents)

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