Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D947802 | Replaceable substrate carrier interfacing film | Edward Golubovsky | 2022-04-05 |
| 10256120 | Systems, methods and apparatus for post-chemical mechanical planarization substrate buff pre-cleaning | Hui Chen, Jim K. Atkinson, Brian J. Brown, Jianshe Tang, Yufei Chen +1 more | 2019-04-09 |
| 10229842 | Double sided buff module for post CMP cleaning | Hui Chen, Jim K. Atkinson, Tomohiko Kitajima, Brian J. Brown | 2019-03-12 |
| D723077 | Chuck carrier film | — | 2015-02-24 |