Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6153530 | Post-etch treatment of plasma-etched feature surfaces to prevent corrosion | Yan Ye, Xiaoye Zhao, Chang-Lin Hsieh, Wen-Chiang Tu, Chung-Fu Chu +1 more | 2000-11-28 |
| 5866483 | Method for anisotropically etching tungsten using SF.sub.6, CHF.sub.3, and N.sub.2 | Guang-Jye Shiau, Paul R. Herz, Xiaobing Ma | 1999-02-02 |