Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790120 | Showerhead having a detachable high resistivity gas distribution plate | Jason C. Della Rosa, Hamid Noorbakhsh, Vladimir Knyazik, Jisoo Kim, Wonseok Lee | 2020-09-29 |
| 10607816 | Showerhead having a detachable high resistivity gas distribution plate | Jason C. Della Rosa, Hamid Noorbakhsh, Vladimir Knyazik, Jisoo Kim, Wonseok Lee | 2020-03-31 |
| 10546731 | Method, apparatus and system for wafer dechucking using dynamic voltage sweeping | Haitao Wang, Michael G. Chafin, Kartik Ramaswamy, Yue Guo, Valentin N. Todorow +3 more | 2020-01-28 |
| 10410845 | Using bias RF pulsing to effectively clean electrostatic chuck (ESC) | Kenny L. Doan, Wonseok Lee, Daisuke Shimizu, Li Ling, Kevin Choi | 2019-09-10 |
| 9911579 | Showerhead having a detachable high resistivity gas distribution plate | Jason C. Della Rosa, Hamid Noorbakhsh, Vladimir Knyazik, Jisoo Kim, Wonseok Lee | 2018-03-06 |